Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/5359
Title: Fundamentals of semiconductor manufacturing and process control
Authors: May, Gary S.
Keywords: Design and construction ; Integrated circuits
Issue Date: 2006
Publisher: Wiley
URI: http://10.6.20.12:80/handle/123456789/5359
ISBN: 978-0-471-78406-7
479
Appears in Collections:Chemical Engineering

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