Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/5359
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dc.contributor.editorMay, Gary S.-
dc.date.accessioned2018-09-28T12:07:55Z-
dc.date.available2018-09-28T12:07:55Z-
dc.date.issued2006-
dc.identifier.isbn978-0-471-78406-7-
dc.identifier.isbn479en_US
dc.identifier.urihttp://10.6.20.12:80/handle/123456789/5359-
dc.language.isoenen_US
dc.publisherWileyen_US
dc.subjectDesign and construction ; Integrated circuitsen_US
dc.titleFundamentals of semiconductor manufacturing and process controlen_US
dc.typeBooken_US
Appears in Collections:Chemical Engineering

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