Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/35829
Title: Micro Electro Mechanical System Design
Authors: Allen, James J.
Keywords: Microelectromechanical systems
Design and construction.
Issue Date: 2005
Publisher: Taylor & Francis Group, LLC
URI: http://10.6.20.12:80/handle/123456789/35829
ISBN: 0-8247-5824-2
463
Appears in Collections:Electrical and Computer Engineering

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