Please use this identifier to cite or link to this item: 192.168.6.56/handle/123456789/24893
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dc.contributor.editorReinhardt, Karen A-
dc.date.accessioned2018-11-27T11:32:42Z-
dc.date.available2018-11-27T11:32:42Z-
dc.date.issued2011-
dc.identifier.isbn978-0-470-62595-8-
dc.identifier.isbn605en_US
dc.identifier.urihttp://10.6.20.12:80/handle/123456789/24893-
dc.language.isoenen_US
dc.publisherJohn Wiley & Sons, Incen_US
dc.subjectSemiconductors Surfaces Cleaningen_US
dc.titleHandbook of Cleaning for Semiconductor Manufacturing Fundamentals and Applicationsen_US
dc.typeBooken_US
Appears in Collections:Mechanical Engineering

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